Laser cleaning system for PVD tool cleaning, can effectively remove multi-layer coating, no mechanical damage, no damage to the weld or sealing surface, reduce heating cycle time, no environmental and chemical reagents, no secondary pollutants No need to clean, general reaction chamber cleaning can be completed in just a few hours.
Laser cleaning technology can even remove the most difficult to clean vapor phase deposits, including diamond-like carbon coatings and other wear resistant coatings. The power of bundled lasers evaporates these "bulletproof coatings". Ultimately, precision metal substrates can be cleaned safely and without damage, and no residue is produced. The plasma chamber can be manually or semi-automatically subjected to effective laser de-coating while cleaning.
PVD physical vapor deposition refers to the process of transferring a substance or a molecule from a source to a surface of a substrate by a physical process. Its function is to make some particles with special properties (high strength, wear resistance, heat dissipation, corrosion resistance, etc.) spray on the lower performance mother body, so that the mother body has better performance. In this process, however, the sprayed lacquer layer not only adheres to the target surface, but also integrates with the surfaces of the tools and fixtures that are used to hold the parts within the reaction chamber. The laser cleaning system can effectively clean the surface of the PVD tool, avoiding the adverse effects of excessive PVD coating materials, such as reducing the tolerance of the workpiece, poor sealing of the reaction chamber, resulting in increased humidity and prolonged heating time.